| 摘要 |
PROBLEM TO BE SOLVED: To enhance visibility while facilitating the positioning due to optical microscopic observation in a scanning probe microscope. SOLUTION: A scanning probe microscope is equipped with a cantilever 6 having a probe, a scanner 2 for scanning a sample S in at least a two-dimensional direction with respect to the probe and a displacement detecting system for detecting the displacement of the cantilever 6. In this case, a moving mechanism 3 for retracting at least either one of a beam splitter 4 separating the laser beam measuring light path of the displacement detecting system and an optical microscope light path for observing the sample and a laser beam protecting filter 5 from the optical microscope light path in such a state that the positional relation of the cantilever 6 to the sample is fixed is provided. By retracting both of or one of the beam splitter 4 and the beam protecting filter 5 from the optical micros-cope light path, a factor reducing the quantity of light of an optical image from the optical microscope light path is removed and the reduction of the quantity of light is suppressed in optical microscopic observation to enhance visibility.
|
