Micropump with peristaltic action for liquids having volumes within microliter ranges comprises a membrane separating pumping and pumped media within a groove with an endless configuration

摘要

A micropump with peristaltic action for liquids having volumes within microliter ranges, which comprises a membrane separating pumping and pumped media within a groove with an endless configuration, is new. The bidirectional micropump with peristaltic action for delivering or holding liquids having volumes within microliter ranges is characterized by: (a) the groove in the substrate (1) has an endless, closed configuration; (b) in the region of nonactivated electrodes (4), the membrane (2) is pressed against the lid (9), while in the region of activated electrodes (3) it is pulled against such electrodes; (c) as a result, a gap is formed either between the lid and the membrane, or between the substrate and the membrane; (d) in the latter case the resultant hollow space is filled with a pumping medium (17). An Independent claim are also included for the following: (1) a method for operating the micropump; and (2) a method for producing the micropumps.