| 摘要 |
<p>Apparatus is disclosed for the production of nitrogen trifluoride (NF3), starting with an anhydrous molten flux including ammonia (NH3), a metal fluoride (MF), and hydrogen fluoride (HF). The apparatus includes an electrolyzer, an ammonia solubilizer, a hydrogen fluoride solubilizer, a nitrogen trifluoride reactor, two compressors, two pumps, three condensers, a gas recycle loop, and two flux loops of the same component ternary flux, but each loop having a different concentration.</p> |
