Magnetron cathode for coating surfaces of substrates consists of an annular target with a plate-like configuration arranged around a central part of a first yoke part arranged as a stator

摘要

Magnetron cathode consists of an annular target (4) with a plate-like configuration arranged around a central part (1a') of a first yoke part (1a) arranged as a stator. The first yoke part parallel to the longitudinal axis of the central part is surrounded by a second yoke part arranged as a rotor having a wide side (B-B') running parallel to the central part. Inner permanent magnets (3) are arranged on the front side of the central part of the first yoke part and outer permanent magnets (2) are arranged vertically to this wide side on the same side on the second yoke part. The outer magnets partially neighbor the upper side of the target.