| 摘要 |
The invention relates to a method for producing microcomponents with at leas t one individual layer, which has functional layers (3) on the walls of inner structures such as flow channels. The aim of the invention is to produce microcomponents that are suitable for a variety of different applications in chemical reaction engineering, for heat-exchange applications, for mixing substances or for evaporating liquids. In particular, the inventive microcomponents should not present any problems in terms of the tightness of the flow channels. To this end, the inventive method comprises the following steps: A) producing the at least one individual layer by a) producing a firs t metal layer or metal film (1), b) forming the inner structures in and/or on said first metal layer or metal film (1) using suitable etching techniques and/or metal application techniques, and c) forming the functional layers (3 ) on the walls of the inner structures only, and then B) stacking and joining the one individual layer to a segment that closes the inner structures or joining several individual layers together and to the closing segment.</SDOA B> |
