发明名称 |
MICROMACHINES OPTOMECHANICAL SWITCHING CELL WITH PARALLEL PLATE ACTUATOR AND ON-CHIP POWER MONITORING |
摘要 |
A number of micromachined optomechanical switching cells and matrix switches including such switching cells are disclosed herein. One optomechanical switching cell of the present invention includes a parallel plate actuator positioned on a substrate. A mirror coupled to the actuator is disposed to selectively redirect an incident optical beam. The present invention also contemplates an optomechanical matrix switch including a substrate and a plurality of optomechanical switching cells coupled thereto. The matrix switch further includes an arrangement for monitoring the optical power incident upon, and output by, the matrix switch.
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申请公布号 |
WO0073840(A1) |
申请公布日期 |
2000.12.07 |
申请号 |
WO2000US14682 |
申请日期 |
2000.05.26 |
申请人 |
OPTICAL MICRO-MACHINES,INC.;HUSAIN, ANIS;FAN, LI |
发明人 |
HUSAIN, ANIS;FAN, LI |
分类号 |
G02B6/35;G02B26/08;H04Q11/00;(IPC1-7):G02B26/02;G02B6/42 |
主分类号 |
G02B6/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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