A micro-mirror device and a method for producing a micro-mirror device

摘要

A micro-mirror device is described comprising a supporting substrate (6), a mirror forming substrate (2), on which a mirror portion (1) is formed, a pair of first torsion beams (3) disposed on a pair of the opposing sides of the mirror forming a substrate (2), which are perpendicular to those sides and support the mirror forming substrate (2), a first driving frame (7, 7A, 7B, 7D) surrounding at least one side of the mirror forming substrate (2) and connected to the mirror forming substrate (2) through a first link beam (10), which is disposed in parallel to the longitudinal direction of the first torsion beams (3), and a first driving force generating means (12, 14) for driving the first driving frame (7, 7A, 7B, 7D) to move so that the movement is transmitted to the mirror forming substrate (2) through the first link beam (10). There is also described a method for producing such a device. <IMAGE>