Liquid discharge head, manufacturing method thereof, and microelectromechanical device

摘要

There is provided a liquid discharge head comprising a substrate (1), a ceiling plate (3) connected to the substrate, a liquid flow path (7) formed between the substrate and the ceiling plate, and a cantilever-like movable member (206) having a fixed end fixed to the substrate and a free end extending into the liquid flow path, wherein the movable member is formed of a lower protective layer, a heat generating resistive layer, a lower electrode layer, an insulating layer, an upper electrode layer, and an upper protective layer stacked from the side of the substrate in the mentioned order, and wherein application of a voltage to a heat generating portion of the heat generating resistive layer causes bubbling of a liquid in the liquid flow path between the movable member and the substrate to discharge the liquid. <IMAGE>