发明名称 Magnetically coupled substrate roller
摘要 <p>A magnetically coupled roller assembly (15) is provided. A magnet (25) of the roller assembly couples to a magnet (27) of a drive assembly (35). The roller and driver assemblies are separated by a chamber wall and magnetically coupled therethrough. A shaft (23) of the roller assembly (15) is positioned in a pocket (31)formed in the chamber wall, and the roller and driver magnets (25, 27) may be axially offset so as to "pull" the roller toward the interior of the pocket. <IMAGE></p>
申请公布号 EP1058295(A2) 申请公布日期 2000.12.06
申请号 EP20000304678 申请日期 2000.06.01
申请人 APPLIED MATERIALS, INC. 发明人 LERNER, ALEXANDER;BIRANG, MANOOCHER
分类号 F16C13/00;H01L21/00;H01L21/304;(IPC1-7):H01L21/00 主分类号 F16C13/00
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