发明名称 |
Magnetically coupled substrate roller |
摘要 |
<p>A magnetically coupled roller assembly (15) is provided. A magnet (25) of the roller assembly couples to a magnet (27) of a drive assembly (35). The roller and driver assemblies are separated by a chamber wall and magnetically coupled therethrough. A shaft (23) of the roller assembly (15) is positioned in a pocket (31)formed in the chamber wall, and the roller and driver magnets (25, 27) may be axially offset so as to "pull" the roller toward the interior of the pocket. <IMAGE></p> |
申请公布号 |
EP1058295(A2) |
申请公布日期 |
2000.12.06 |
申请号 |
EP20000304678 |
申请日期 |
2000.06.01 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LERNER, ALEXANDER;BIRANG, MANOOCHER |
分类号 |
F16C13/00;H01L21/00;H01L21/304;(IPC1-7):H01L21/00 |
主分类号 |
F16C13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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