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发明名称
Method for manufacturing capacitor's lower electrode
摘要
申请公布号
GB2337159(B)
申请公布日期
2000.12.06
申请号
GB19980009770
申请日期
1998.05.07
申请人
* UNITED SEMICONDUCTOR CORP;* UNITED MICROELECTRONICS CORP,
发明人
JHY-JYI * SZE;HSIU-WEN * HUANG;GARY * HONG;ANCHOR * CHEN
分类号
H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L27/108;(IPC1-7):H01L21/320;H01L21/824
主分类号
H01L27/04
代理机构
代理人
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