CORROSION RESISTANT MOLYBDENNUM MASK

摘要

A molybdenum mask for use in the sputter deposition of electrically conductive materials on preselected areas of a substrate is coated with a transition metal carbide. The carbide protects the metal images defined on the mask from degradation during mask cleaning and related processes, thereby dramatically extending the usable service life of the mask. The present invention overcomes the problem of reduced usable life of a molybdenum mask used in sputter coating and similar evaporative deposition processing.