ELECTRON BEAM-WRITING APPARATUS AND ELECTRON BEAM-WRITING METHOD,申请号KR19970042116-传众专利搜索

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发明名称	ELECTRON BEAM-WRITING APPARATUS AND ELECTRON BEAM-WRITING METHOD
摘要
申请公布号	KR100272478(B1)	申请公布日期	2000.12.01
申请号	KR19970042116	申请日期	1997.08.28
申请人	NEC CORPORATION	发明人	ITOO, GAZUYUKI
分类号	G03F7/20;H01J37/317;H01L21/027;(IPC1-7):H01L21/26	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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