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发明名称
METHOD OF CONSTRUCTING CMOS VERTICALLY MODULATRD WELLS BY CLUSTERED MEV BILLI IMPLANTION
摘要
申请公布号
KR100272394(B1)
申请公布日期
2000.12.01
申请号
KR19977003421
申请日期
1997.05.19
申请人
VARIAN ASSOCIATES INC
发明人
JOHN, O BORLAND
分类号
H01L21/761;H01L21/762;H01L21/8238;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/761
代理机构
代理人
主权项
地址
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Package
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