METHOD OF MANAFACTURING SEMICONDUCTOR DEVICE, APPARATUS OF MANUFACTURING THE SAME, AND METHOD OF CLEANING THE SAME,申请号KR19970012329-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	METHOD OF MANAFACTURING SEMICONDUCTOR DEVICE, APPARATUS OF MANUFACTURING THE SAME, AND METHOD OF CLEANING THE SAME
摘要
申请公布号	KR100272146(B1)	申请公布日期	2000.12.01
申请号	KR19970012329	申请日期	1997.04.03
申请人	KABUSHIKI KAISHA TOSHIBA	发明人	MIKATA, YUICHI
分类号	C23C16/44;C23C16/455;C23C16/46;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/203	主分类号	C23C16/44
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Improvements in or relating to Adjustable Struts Applicable To Building Construction Particularly For Supporting Floor Shuttering

A Ship's Accommodation Ladder

Cellulose Acetate-Butyrates

Improvements in or relating to Process for Forming Refractory-Oxide-Containing Gel Beads

A Cycle For Steam Power Plant

Improvements in Radar Camouflage Layers

An Improved Homogeniser

New Methanobenzazocine Derivatives and Processes for their production

1-Acyl-Benzimidazolines and the use thereof as Fungicidal Agents

Improvements in or relating to Self-Supporting Elements for Erecting Dismantlable Constructions

Improvements in or relating to Fluidised-Bed Apparatus

Anthraquinone Dyes for Synthetic Fibres

Stable Solutions of Erythromycin Free Base

Improvements in Electrical Rotary Scythe Lawn Mowers

Herbicidal Compositions

Quaternary Ammonium Halides

Apparatus for Electrochemical Analyses

Improvements in or relating to the Application of a Finish to a Peripheral Surface of a Workpiece

Electronic Paramagnetic Resonance Spectrometer for Nuclear Reactors

Improvements in or relating to Sound Reproducing Apparatus.