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发明名称	CHECK SYSTEM FOR PRODUCTION PROCESS PROCEDURE
摘要
申请公布号	KR100267138(B1)	申请公布日期	2000.12.01
申请号	KR19970006662	申请日期	1997.02.28
申请人	NEC CORPORATION	发明人	TOYOTA, HITEO
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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