发明名称 |
DEPTH OF FOCUS ENHANCEMENT METHOD AND ITS DEVICE USING OPTICAL COMPONENT MADE BIREFRINGENT MATRIAL LITHOGRAPHT TOOLS |
摘要 |
PURPOSE: A method for extending depth of focus of an optical system for lithographic equipment using transmission-type optical parts made of a double refraction material is provided to extend a range of an image in a direction of an optical axis, by making the image located in different positions have a predetermined interval in an optical axial direction depending on a polarization component of illumination light. CONSTITUTION: An optical system uses transmission-type double refraction optical parts(210) made of a double refraction material or a double refraction optical unit composed of the optical parts. An image by the double refraction optical unit(200) is focused in different positions and in a direction of an optical axis of the optical system to extend depth of focus, depending on a polarization component of illumination light(20).
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申请公布号 |
KR100269244(B1) |
申请公布日期 |
2000.12.01 |
申请号 |
KR19980019516 |
申请日期 |
1998.05.28 |
申请人 |
KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KIM, DOH HOON;LEE, KAG HYEON;CHOI, SANG SOO;CHUNG, HAI BIN;KIM, BO WOO |
分类号 |
H01L21/027;G02B5/30;G03F7/20;(IPC1-7):H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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