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发明名称
PLASMA TREATMENT APPATATUS
摘要
申请公布号
KR100272189(B1)
申请公布日期
2000.12.01
申请号
KR19940034797
申请日期
1994.12.17
申请人
TOKYO ELECTRON LIMITED
发明人
HAMA, KIICHI;HATA, JIRO;HONGO, DOSHIAKI
分类号
C23C16/44;C23C16/455;C23C16/458;C23C16/50;C23C16/505;C23C16/509;(IPC1-7):H01L21/302
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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