发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device includes a semiconductor element provided on a substrate, a lead-in wiring electrically provided on a substrate, a lead-in wiring electrically connected with the electrode of the semiconductor element, a barrier metal film for covering the lead-in wiring surface for protecting the lead-in wire, wherein the section of the lead-in wiring is inversely trapezoidal in shape vertial to the lengthwise direction of the lead-in wiring.
申请公布号 KR100270758(B1) 申请公布日期 2000.12.01
申请号 KR19980018022 申请日期 1998.05.19
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 SATOU, TAMIO
分类号 H01L23/52;H01L21/3205;H01L23/528;H01L23/532;(IPC1-7):H01L21/28 主分类号 H01L23/52
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