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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
KR100265866(B1)
申请公布日期
2000.12.01
申请号
KR19980028012
申请日期
1998.07.11
申请人
JU SUNG ENGNEERING CO., LTD.
发明人
HWANG, CHUL-JU
分类号
H01L21/18;(IPC1-7):H01L21/18
主分类号
H01L21/18
代理机构
代理人
主权项
地址
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