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发明名称
INTERLOCK APPARATUS OF DRY ETCHING APPARATUS
摘要
申请公布号
KR200193598(Y1)
申请公布日期
2000.12.01
申请号
KR19940030640U
申请日期
1994.11.18
申请人
HYUNDAI ELECTRONICS IND. CO., LTD
发明人
PARK, CHULSOO;KIM, KYUNGWOO;WHANG, KIYONG
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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