| 摘要 |
PURPOSE: A mask having alignment mark is provided to prevent an error and a serious accident in manufacturing a mask and to intensify a reference of a source material in testing a mask, by setting a reference mask, and by overlapping masks excluding the reference mask with the reference mask. CONSTITUTION: A series of masks are respectively located in the lower portions of the first and left sides of a pattern formation region, to be included in the pattern formation region. An alignment mark has either one of a rectangular shape or rectangle inside a rectangle.
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