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发明名称
EXPOSURE APPARATUS
摘要
申请公布号
KR200205409(Y1)
申请公布日期
2000.12.01
申请号
KR19970025355U
申请日期
1997.09.06
申请人
HYUNDAI MICRO ELECTRONICS CO., LTD.
发明人
KIM, DONG MYUNG
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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