| 摘要 |
PROBLEM TO BE SOLVED: To avoid deterioration of working efficiency and working environment dnue to the mask for sandblast treatment by applying adhesive sheets with a specific pattern onto a silicon wafer and performing a sandblast treatment to the wafer with the adhesive sheets as a mask for machining into a prescribed pattern. SOLUTION: Adhesive sheets 5 with a prescribed pattern are applied onto a silicon wafer 1, that is fixed to a pedestal 3 by pressing the adhesive sheets 5 with a prescribed pattern that are provided at a mold release sheet 6 that is made of a plastic film or the like whose surface is coated with, for example, silicone and are supplied at a fixed speed onto the silicon wafer 1 for transferring using an application roller 7. The adhesive sheets 5 should have sufficient adhesion force for the silicon wafer 1, and various kinds of acryl and rubber adhesives are used.
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