发明名称 |
A PULSE-POSITION SYSTEM FOR MINIATURE STRUCTURES |
摘要 |
Pulse-position synchronization is provided in miniature structure manufacturing processes which is carried out in a fabrication tool (10) having a target (23), a source (11) of energy generating pulses of energy, and a control unit (15) operatively coupled to the source (11) of energy and the target (23). The technique includes the steps of exposing a target (23) to a first pulse of energy, pausing the exposure of the target (23) while providing relative motion between the target (23) and the energy source (11) at a predetermined maximum speed, and slowing (or stopping) relative motion between the target (23) and the energy source (11), while exposing the target (23) to a second pulse of energy. The fabrication tool (10) employing the pulse-position synchronization can be operated by the control unit (15) in either patterned "additive" or patterned "subtractive" modes of operation.
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申请公布号 |
WO0072223(A1) |
申请公布日期 |
2000.11.30 |
申请号 |
WO2000US09818 |
申请日期 |
2000.05.24 |
申请人 |
POTOMAC PHOTONICS, INC.;DUIGNAN, MICHAEL, T. |
发明人 |
DUIGNAN, MICHAEL, T. |
分类号 |
B23K15/00;B23K26/08;(IPC1-7):G06F19/00 |
主分类号 |
B23K15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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