| 摘要 |
PROBLEM TO BE SOLVED: To obtain a self-detection-type probe which is of a self-excitation type and which can perform a measurement with high accuracy and to obtain a scanning probe device which uses the probe. SOLUTION: In this scanning probe device, the lever 3 of a probe 1 is vibrated, and a sample is measured. A resistor 5 is installed at the lever 3, a periodic bias signal is applied to the resistor 5, the lever 3 is vibrated without being excited from the outside and the displacement of the lever 3 can be detected on the basis of a change, in the resistance of the resistor 5 which is generated at this time. |
