| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure capable of realizing no generation of particles, small quantity of outgassing, high degree of airtightness, high positional accu racy, and high throughput, in spite of its being simple in structure and having easy maintenance. SOLUTION: This apparatus has a barrier plate 32 for defining a different ambient space from the atmospheric-air side ambience, an inside magnetic ring 38a, and an outside magnetic ring 40a. The inside magnetic ring 38a is provided in the atmospheric-air side ambience, and the outside magnetic ring 40a is provided in the space defined by the barrier plate 32. The inside and outside magnetic rings 38a, 40a form a magnetic coupler which is coupled magnetically to each other via the barrier plate 32. The outside magnetic ring 40a is supported rotatably around the barrier plate 32 via a bearing by the barrier plate 32. Respective magnets 44a, forming the inside magnetic ring 38a are displaced in their arrangement order with the sense of each magnet 44a approaching each magnet 48a of the outside magnetic ring 40a or of each magnet 44a separating from each magnet 48a to give a torque to the outside magnetic ring 40a. |
