| 摘要 |
PROBLEM TO BE SOLVED: To reduce an ozone exhausted from a lamp house to a heat exhaust system. SOLUTION: This apparatus comprises a treatment container receiving a body to be treated, treated gas-supplying means (a gas-supplying pipe) for supplying the treatment gas containing ozone to the treatment container, and a lamp house 20 provided on the treatment container via a ultraviolet-ray transmitting window in which a ultraviolet-ray lamp is received, and the ozone in the treatment container is irradiated with the ultraviolet-rays from the ultraviolet-ray lamp to be decomposed so as to oxidize the body to be treated. An inlet port 22 and an exhaust port 23 for circulating cooling air are provided on the lamp house 20, and ozone decomposing means 51 is provided in a thermal exhaust system 50 connected to the exhaust port 23.
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