| 摘要 |
PROBLEM TO BE SOLVED: To discriminate abnormal values due to the faults of the measurement means of an aligner from the those caused by external factors, when its measurement means for atmospheric pressure, etc., indicate abnormal values, by referring the abnormal- operation preventing means of the exposure apparatus to the measured results of a measurement object in other exposure apparatuses too, and by preventing the expo sure apparatus from operating in an abnormal state. SOLUTION: By checking the fluctuating amounts of atmospheric pressures measured in a short term, barometers 19A, 19B are so set as to deem them as being abnormal, when they exceed a fixed value. That is, when deciding this abnormality, by using the difference between the measured values by the two barometers 19A, 19B in a projective exposure apparatus and using the difference between the atmospheric pressure values measured in the present time and in the last time, whether the fluctuations of the measured values of the atmospheric pressure are caused by the faults of the barometers 19A, 19B themselves or by external factors is decided. Then, when the faults of the barometers 19A, 19B themselves, by substituting the atmospheric pressure value of another exposure apparatus for the one of this exposure apparatus in a fixed term or temporarily, the corrections of its focal position and its magnification are performed to enable continuing of its processing.
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