| 摘要 |
<p>There are provided a container base (104) on which a holder container (106) having an openable/closable door (108) and capable of housing a wafer holder (68) in a sealed state, an opening/closing mechanism (112) for opening/closing the door (108) in a state where the inside of the container (106) placed on the container base (104) is isolated from the outside, and a transfer system (100) for exchanging the holder on a stage (WST) for the holder in the container (106). The transfer system (100) can exchange holders in a short time in a state where the inside of the system is isolated from the outside, so that the system stop time is as short as possible and that the cleanliness of the holders can be always maintained high. As a result, the productivity of devices such as semiconductor devices is improved.</p> |
