发明名称 NEW HIGH-PERFORMANCE MOSFET SUITABLE FOR REFINEMENT
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having an MOSFET structure that can improve the characteristics of a semiconductor element and can suppress variations of the characteristics. SOLUTION: In a semiconductor element provided with a drain junction region 503 and a source junction region 502 in a semiconductor substrate 501, in which impurity is nearly evenly distributed at a relatively low concentration, a gate insulating film 506 formed on the substrate 501, and a gate region 507 on the film 506, a region 508 in which the impurity is distributed at a relatively high concentration at a depth which practically is equal to the distributed depths of the impurity in the drain and source junctions 503 and 502 is formed between the regions 503 and 502 in the substrate 501.
申请公布号 JP2000332236(A) 申请公布日期 2000.11.30
申请号 JP19990136768 申请日期 1999.05.18
申请人 UNIV HIROSHIMA 发明人 MIURA MICHIKO;TANAKA MASAYASU;MATTAUSH HANS JURGEN
分类号 H01L29/78;H01L21/265;H01L29/10;(IPC1-7):H01L29/78 主分类号 H01L29/78
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