| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer irradiating device irradiating on a large area, and restraining an increase of the temperature with multiple excimer lamps provided. SOLUTION: An excimer irradiating device 1 is provided with an excimer irradiating part 2 provided with two or more excimer lamps 4, and a power supply part 3 impressing a high frequency voltage on the excimer lamps 4. The excimer irradiating part 2 has a irradiating surface 5 letting excimer light generated from the excimer lamps 4 transmit, and a reflecting surface 6 provided on a opposing surface, and reflecting the excimer light. The excimer lamps 4 has a discharge tube, an inner tube provided inside the discharge tube, a gas for discharge filled in the discharge tube, an outer electrode placed outside the discharge tube, and an inner electrode placed inside the inner tube. A blasting opening 7 for cooling and filling gas 8 is provided on the reflecting surface 6. An introducing opening 36 for the cooling gas is provided on the inner tube.
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