| 摘要 |
A piezoelectric and/or electrostrictive film-type element comprises a zirconia substrate (2) with a thin-walled diaphragm section (10) provided integrally to cover and close a window (6) to serve as a hollow space, and a film-shaped piezoelectric and/or electrostrictive operating section (18) composed of a lower electrode (12), a piezoelectric and/or electrostrictive layer (14), and an upper electrode (16) which are successively provided in a layered configuration on an outer surface of the diaphragm section (10) in accordance with a film-forming method, wherein at least a part of a peripheral edge portion of the piezoelectric and/or electrostrictive layer (14) extends laterally beyond a corresponding peripheral edge portion of the lower electrode (12) to construct an overhang section (14a) located opposingly over the diaphragm section (10), and the overhang section (14a) is in a state of incomplete connection with respect to a partial region of the diaphragm section (10) located just thereunder by the aid of particles of an alumina-magnesia compound such as spinel particles allowed to intervene therebetween. Thus, it is possible to effectively improve, for example, the piezoelectric and/or electrostrictive characteristics such as the displacement amount, and the resonance frequency characteristics. <IMAGE> |
