| 摘要 |
PROBLEM TO BE SOLVED: To provide a lot supplying system and a lot supplying method which can protect product lots against dust from humans and can contribute to increase in yield of products by substituting measurement of a reference lot for measurement of a product lot and reflecting the results of measurement of the reference lot in the treatment history records of the product lots. SOLUTION: The lot supplying system is provided with a counter 14 for counting the number of product lots supplied to each treating device, a supply control device 13 which supplies the reference lot previously stored in a stocker 11 when the counted value of the counter 14 reaches the set value which is set for each treating device and initializes the value of the counter 14 and a history record storing device 16 which reflects the measurement data of a measuring device 18 in the history of product lots which are treated by the treating devices form the supply of the previous reference lot until the supply of the current reference lot. |
