OPTICAL WAVEGUIDE ELEMENT AND PRODUCTION OF OPTICAL WAVEGUIDE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide element having a uniform compsn. and an optically smooth surface and having a single crystal epitaxial PLZT (Pb1-xLax(Zr1-yTiy)1-x/4O3) ferroelectric thin film. SOLUTION: At least a first ferroelectric layer 14 and a second ferroelectric layer 16 are formed on a single crystal substrate 12 of an optical waveguide element. The first ferroelectric layer 14 consists of a single crystal or epitaxial Pb1-xLax(ZryTi1-y)1-X/4O3 with x and y ranging 0