DEVICE AND METHOD FOR TREATING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To quickly execute a treatment such as the removal of organic matters with ozone-containing water, etc. SOLUTION: Pure water or ozone-containing water flowing through a circulating pipeline L1 is cooled by means of a chiller 8. The ozone-containing water is produced by dissolving ozone gas in the cooled pure water or ozone-containing water by means of an ozone gas dissolving section 10 and supplied to a cleaning both 2. The ozone-containing water stored in the tank 2 is heated with a heater 6 and a plurality of substrates W is dipped in the heated ozone-containing water.