A parallel nanotomography system is provided having an X-ray source (10), which is preferably a laser-based X-ray source that generates X-rays that are collected using a collector optic (60) and are received in a composite objective assembly (120). The composite objective assembly includes plural micro-objectives, each imaging the target (80). The X-ray image is received by an X-ray image formation and acquisition apparatus (160), and processed and/or displayed.
申请公布号
WO0072330(A1)
申请公布日期
2000.11.30
申请号
WO2000US14320
申请日期
2000.05.24
申请人
JMAR RESEARCH, INC.;NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (NIST);LEVINE, ZACHARY, H.;TURCU, EDMOND, I., C.
