| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method and an apparatus, for the inspection of a defect, in which the defect can be detected easily and precisely without correcting the density of an object, to be inspected, even when the density according to a place of the object to be inspected is irregular or even when the density in every production lot is irregular. SOLUTION: A moving-average processing operation is executed to the gray level image A of an object to be inspected (S2). The difference image S between an obtained moving-average processed image ave(A) and the gray level image A is found (S3). The quality of every pixel is judged on the basis of the difference image S and on the basis of a prescribed threshold value (S4). That is to say, when the density of the object to be inspected is different from a moving average density, a relative defect judgment by which the pixel is judged to be a defect pixel is performed. Thereby, even when the density according to a place of the object to be inspected is irregular, or even when the density in every production lot is irregular, the defect of the object to the inspected can be detected easily and precisely without taking measures to correct the density or the like. |
