DUST GENERATOR AND CLEAN ROOM SYSTEM

摘要

PROBLEM TO BE SOLVED: To control the quantity and the particle size of dust being generated accurately. SOLUTION: Dust containing air being supplied by means of an air supply means, i.e., an air compressor 1, is passed through a filter in the way of a supply line in order to cut dusts of specified particle size or larger. A dust generation particle counter 6 measures the quantity of generated dust after the air has passed through the filter 4 and delivers the measurement to an operating unit 7. The operating unit 7 compares the measurement with a preset quantity of dust and controls a flow rate regulator 3 such that the measurement has a set value.