| 摘要 |
PROBLEM TO BE SOLVED: To obtain a scanning Kelvin probe microscope in which a frequency component not required to detect potential information on the surface of a sample to be measured is suppressed and in which the S/N ratio of the potential information on the surface of the sample is enhanced. SOLUTION: In this scanning Kelvin probe microscope, when an uneven part on the surface of a sample is measured, an AC signal used to vibrate a conductive cantilever probe 2 and an AC voltage signal to be applied across the conductive cantilever probe and the sample in order to measure potential information on the sample are made to act simultaneously, the AC voltage signal is made to act across the conductive cantileber probe and the sample when the potential information is measured, and the surface of the sample is scanned and measured.
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