| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve operability and safety by making a clearance between one side lock hole part and one side lock part larger than the clearance between the other side lock hole part and the other side lock part. SOLUTION: In this wafer cassette carrying case, a rear side lock 6 is made to pass through a rear side lock hole 11, after a front side lock 3 is made to pass through a front side lock hole 9, and a cover 2 is fixed to a stage board 1. In this process, the clearance between the rear side lock hole 11 and the rear side lock 6 is made larger than the clearance between the front side lock hole 9 and the front side lock 3. Therefore, the rear side lock 6 is readily and surely made to pass through the rear side lock hole 9, and an entire brim 2a of the cover 2 adheres to the stage board 1. The cover 2 can be surely fixed to a stage board through the operation of a lever 4. Thereby, a wafer cassette can be carried safely and moreover surely without causing it to fall.</p> |
