发明名称 METHOD FOR CORRECTING INTERFERENCE FRINGE IMAGE
摘要 PROBLEM TO BE SOLVED: To obtain an image correcting method for a device for simultaneously measuring phase-shift interference fringes capable of automatically adjusting the contrast and luminance of three simultaneously obtained interference fringe images through the use of electric image pickup data. SOLUTION: In a light-wave interferometer to create interference fringes by sample light from a surface to be detected and reference light from a reference surface, the contrast value and bias value of each section are obtained from interference fringe image data acquired by an image pickup processing means to pick up the image of interference fringes, and the interference fringe image data are corrected and converted so as to cancel the mutual difference between the contrast values and the bias values between the sections to perform image analysis or to display the interference fringe images through the use of the interference fringe image data after the correction and conversion.
申请公布号 JP2000329514(A) 申请公布日期 2000.11.30
申请号 JP19990136832 申请日期 1999.05.18
申请人 MITSUTOYO CORP 发明人 KAWASAKI KAZUHIKO;MITSUYA NAOKI;FUJIMOTO IKUMATSU;HAINO HIROSHI
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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