TORSIONAL OSCILLATION BODY

摘要

PROBLEM TO BE SOLVED: To provide a torsional oscillation body with which the rigidity of torsional spring structures is improved and the nonlinearity in torque twist angular characteristics is suppressed. SOLUTION: The torsional oscillation body used for an optical scanner has a moving part 112 and a stationary part 114 enclosing the same and a pair of the torsional spring structures 116 and 118 for connecting both. The moving part 112 is provided with coils 120 encircling its edge and the inner side thereof is provided with a mirror 130. Both ends of the coils 120 are connected via wiring 127 to electrode pads existing on the stationary part 114. The torsional spring structure 116 comprises two leaf springs 132 and 134 extending in parallel and the torsional spring structure 118 comprises two leaf springs 136 and 138 extending in parallel. These four leaf springs 132 and 134 as well as 136 and 138 have the same thickness.