| 摘要 |
PROBLEM TO BE SOLVED: To improve efficiency of sample treatment in the vacuum treatment apparatus as a whole in an operation for parallel processing of samples in a plurality of treatment chambers. SOLUTION: This apparatus comprises a plurality of cassettes 1-3 for housing samples, means 4 for carrying the samples, a plurality of vacuum treating chambers 8-11 for treating the samples one by one, a means for exhausting at reduced pressures the treating chambers 8-11, a loading chamber 6 and unloading chamber 12, both communicating with the treating chambers 8-11, and an apparatus control means 15 for controlling the carrying and treating of samples. The control means 15 measures the sample carrying time and the treating times in the treating chambers 8-11, and determines the order of taking out the samples from the cassettes 1-3, based on the measured times. |
