发明名称 APPARATUS AND METHOD FOR POSITIONING BOARD IN PROCESSOR
摘要 PROBLEM TO BE SOLVED: To obtain a positioning apparatus for board by which a board can be positioned quickly and which can increase the throughput. SOLUTION: In this positioning apparatus for a board in a processor, a mounting table 15 on which the board is mounted and a processing part 21 are moved relatively, and a prescribed processing operation is executed in a processing position EP. In this case at least two alignment scopes 33, 37 which are arranged and installed on a line which sandwiches the relative movement direction of the mounting table 15 and the processing part 21, and which crosses the movement direction obliquely, are provided. Reference holes are measured by the alignment scopes 33, 37, and the board is positioned. By using at least two of the alignment scopes 33, 37 which are arranged and installed on the line crossing the movement direction obliquely, the position of a reference hole on the side of the processing part 21 and the position of a reference hole on the side distant from the hole can be measured simultaneously without moving the mounting table 15.
申请公布号 JP2000329544(A) 申请公布日期 2000.11.30
申请号 JP19990143068 申请日期 1999.05.24
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 YAMAMOTO MASAAKI;SHIROTA HIROYUKI
分类号 G01B21/00;G03F9/00;(IPC1-7):G01B21/00 主分类号 G01B21/00
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