Method and apparatus for correlating data from a semiconductor wafer process

摘要

A method for correlating detected defects occurring during making of an array of memory cells to failed memory cells therein includes inspecting the array of memory cells to detect defects occurring during making thereof, and testing the array of memory cells to determine the failed memory cells. Clusters are formed for the spaced apart failed memory cells, and the detected defects are correlated with the formed clusters of spaced apart failed memory cells. Each formed cluster of spaced apart failed memory cells is based upon proximity between the failed memory cells. In addition, each formed cluster of spaced apart failed memory cells is defined as a predetermined shape so that the correlation process is made less complex when comparing detected defects to failed memory cells. Clustering thus treats spaced apart failed memory cells that are in close proximity to one another as a single failure since the failures are likely to be caused by the same defect.