发明名称 Method for manufacturing photoelectric conversion device
摘要 <p>A photoelectric conversion device including a plurality of pin junction layers, wherein at least a p-layer adjacent to an n-layer is formed of a stack of an amorphous silicon layer as a first p-layer and an amorphous silicon layer as a second p-layer, the first p-layer having a thickness of 5 nm or less and containing a p-type impurity and an n-type impurity, and the second p-layer having a p-type impurity concentration gradually decreasing as it is closer to an i-layer.</p>
申请公布号 EP1056139(A2) 申请公布日期 2000.11.29
申请号 EP20000111272 申请日期 2000.05.25
申请人 SHARP KABUSHIKI KAISHA 发明人 KISHIMOTO, KATSUSHI
分类号 H01L21/20;H01L31/076;H01L31/20;(IPC1-7):H01L31/075 主分类号 H01L21/20
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