发明名称 |
ULTRAHIGH VACUUM FOCUSED ION BEAM MICROMILL AND ARTICLES THEREFROM |
摘要 |
An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. |
申请公布号 |
EP0755547(A4) |
申请公布日期 |
2000.11.29 |
申请号 |
EP19960906225 |
申请日期 |
1996.02.01 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;LAMARTINE, BRUCE C.;STUTZ, ROGER A. |
发明人 |
LAMARTINE, BRUCE, C.;STUTZ, ROGER, A. |
分类号 |
B23K15/00;H01J37/305 |
主分类号 |
B23K15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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