发明名称 Method for manufacturing planar waveguide structures and waveguide structure
摘要 A planar wave-guide structure production process comprises carrying out fluorination prior to each step of applying a core structure (3) and a cover layer (5) onto a bottom layer (2) on a silicon or glass substrate. An Independent claim is also included for a wave-guide structure having a fluorine-containing layer (4) between individual bottom, core and cover layers (2, 3, 4).
申请公布号 EP0973050(A3) 申请公布日期 2000.11.29
申请号 EP19990440163 申请日期 1999.06.24
申请人 ALCATEL 发明人 WEBER, DIETER
分类号 G02B6/13;G02B6/12;G02B6/132;G02B6/136 主分类号 G02B6/13
代理机构 代理人
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