| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent dielectric breakdown of a piezoelectric layer and to reduce initial flexure of a diaphragm. SOLUTION: The ink jet recording head comprises a pressure generating chamber 12 communicating with a nozzle opening, and a piezoelectric element 300 comprising a lower electrode 60 provided in a region corresponding to the pressure generating chamber 12 through an insulation layer 55, a piezoelectric layer 70 provided on the lower electrode 60 and an upper electrode 80 provided on the piezoelectric layer 70. Since at least the opposite end parts in the widthwise direction of the lower electrode 60 facing the pressure generating chamber 12 are located in a region facing the pressure generating chamber 12 and the piezoelectric layer 70 covers side face at the opposite end parts in the widthwise direction of the lower electrode 60, dielectric breakdown strength of the piezoelectric layer is enhanced while reducing initial flexure of a diaphragm.</p> |
