PLASMA PROCESSING APPARATUS,申请号EP19990958406-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	EP1055250(A1)	申请公布日期	2000.11.29
申请号	EP19990958406	申请日期	1999.12.10
申请人	SURFACE TECHNOLOGY SYSTEMS PLC	发明人	BHARDWAJ, JYOTI, KIRON;LEA, LESLIE MICHAEL
分类号	B01J19/08;C23C16/505;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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